https://scholars.lib.ntu.edu.tw/handle/123456789/503927
Title: | Field emission of nanostructured amorphous SiCN films deposited by reactive magnetron sputtering of SiC in CH4/N2 atmosphere | Authors: | H. Y. Lin Y. C. Chen C. Y. Lin Y. P. Tong L. G. Hwa K. H. Chen L. C. Chen |
Issue Date: | 2002 | Publisher: | Elsevier B.V. | Journal Volume: | 416 | Journal Issue: | 1-2 | Start page/Pages: | 85-91 | Source: | ?Thin Solid Films | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/503927 | ISSN: | 00406090 | DOI: | https://doi.org/10.1016/S0040-6090(02)00712-5 |
Appears in Collections: | 凝態科學研究中心 |
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