https://scholars.lib.ntu.edu.tw/handle/123456789/526180
DC Field | Value | Language |
---|---|---|
dc.contributor.author | CHIA-YEN LEE | en_US |
dc.contributor.author | Dong, Z.-H. | en_US |
dc.creator | Lee, C.-Y.;Dong, Z.-H. | - |
dc.date.accessioned | 2020-12-16T07:08:07Z | - |
dc.date.available | 2020-12-16T07:08:07Z | - |
dc.date.issued | 2019 | - |
dc.identifier.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85068173806&doi=10.1109%2fTSM.2019.2925362&partnerID=40&md5=9264443f2d46317a9925f376a0b0edeb | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/526180 | - |
dc.relation.ispartof | IEEE Transactions on Semiconductor Manufacturing | - |
dc.title | Hierarchical Equipment Health Index Framework | en_US |
dc.type | journal article | en |
dc.identifier.doi | 10.1109/TSM.2019.2925362 | - |
dc.identifier.scopus | 2-s2.0-85068173806 | - |
dc.relation.pages | 267-276 | - |
dc.relation.journalvolume | 32 | - |
dc.relation.journalissue | 3 | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Publications | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.grantfulltext | none | - |
item.openairetype | journal article | - |
crisitem.author.dept | Information Management | - |
crisitem.author.parentorg | College of Management | - |
Appears in Collections: | 資訊管理學系 |
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