https://scholars.lib.ntu.edu.tw/handle/123456789/581390
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chen H.-C | en_US |
dc.contributor.author | Fu L.-C. | en_US |
dc.contributor.author | LI-CHEN FU | en_US |
dc.creator | Chen H.-C;Fu L.-C. | - |
dc.date.accessioned | 2021-09-02T00:08:37Z | - |
dc.date.available | 2021-09-02T00:08:37Z | - |
dc.date.issued | 2019 | - |
dc.identifier.issn | 1062922X | - |
dc.identifier.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85076795303&doi=10.1109%2fSMC.2019.8914599&partnerID=40&md5=af57d097a06944648369f18ea76685e4 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/581390 | - |
dc.description.abstract | Atomic force microscope (AFM) is capable of constructing accurate 3-D surface profile at a nanometer resolution. This paper demonstrates the amplitude-detection mode atomic force microscopy (AM-AFM) with long-range of the modified cycloid trajectory. For this purpose, the proposed system contains three axis scanner including the hybrid xy-scanning subsystem and the z-measuring subsystem. Besides, the internal model principle-based neural network complementary sliding mode control (IMP-based NNCSMC) approach of designing controller is implemented for the xy-piezoelectric scanner to overcome some uncertainties, i.e. hysteresis and cross-coupling effect. On the other hand, the neural network complementary sliding mode control (NNCSMC) scheme is employed on controller design along the z-piezoelectric scanner to precisely trace the topography change based on amplitude feedback signals. Due to incorporating the piezoelectric leg-based long traveling range nano-positioning stage (LTRPS) in xy-plane, an accurate AFM imaging can be obtained with the modified cycloid trajectory for long-range scanning. ? 2019 IEEE. | - |
dc.relation.ispartof | Conference Proceedings - IEEE International Conference on Systems, Man and Cybernetics | - |
dc.subject | Controllers; Nanotechnology; Piezoelectricity; Scanning; Sliding mode control; Topography; Trajectories; Amplitude detection; Controller designs; Cross-couplings; Internal model principle; Nano-positioning stages; Nanometer resolutions; Piezoelectric scanner; Surface profiles; Atomic force microscopy | - |
dc.title | Long-range AFM imaging with modified cycloid trajectory | en_US |
dc.type | conference paper | en |
dc.identifier.doi | 10.1109/SMC.2019.8914599 | - |
dc.identifier.scopus | 2-s2.0-85076795303 | - |
dc.relation.pages | 1763-1768 | - |
dc.relation.journalvolume | 2019-October | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.fulltext | no fulltext | - |
item.openairetype | conference paper | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Computer Science and Information Engineering | - |
crisitem.author.dept | Center for Artificial Intelligence and Advanced Robotics | - |
crisitem.author.orcid | 0000-0002-6947-7646 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
Appears in Collections: | 資訊工程學系 |
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