https://scholars.lib.ntu.edu.tw/handle/123456789/584714
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Chi-Yuan | en_US |
dc.contributor.author | Chang, Pei-Ze | en_US |
dc.contributor.author | Chen, Yung-Yu | en_US |
dc.contributor.author | Dai, Ching-Liang | en_US |
dc.contributor.author | Wang, X.-Y. | en_US |
dc.contributor.author | Chen, P.-H. | en_US |
dc.contributor.author | PING-HEI CHEN | en_US |
dc.date.accessioned | 2021-10-14T03:38:58Z | - |
dc.date.available | 2021-10-14T03:38:58Z | - |
dc.date.issued | 2006 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/584714 | - |
dc.relation.ispartof | Sensors and materials | - |
dc.title | A Novel Method for In-Situ Monitoring of the Thickness of a Silicon Wafer during Wet Etching | en_US |
dc.type | journal article | en |
dc.relation.pages | P.0 | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.cerifentitytype | Publications | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
crisitem.author.dept | Mechanical Engineering | - |
crisitem.author.orcid | 0000-0002-8073-9344 | - |
crisitem.author.parentorg | College of Engineering | - |
Appears in Collections: | 機械工程學系 |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.