https://scholars.lib.ntu.edu.tw/handle/123456789/587748
Title: | Macromodels of 3D Lateral Viscous Damping Effects for MEMS Devices | Authors: | P.-C. Yen Y-J Yang YAO-JOE YANG |
Issue Date: | 2003 | Source: | in Proc. of 第七屆奈米工程暨微系統技術研討會 | Description: | Taipei, Taiwan |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/587748 |
Appears in Collections: | 機械工程學系 |
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