|Title:||Numerical studies of variations in gap бо finger width ratio and traveled distance for the driving force of RF MEMS device using Dual BEM||Authors:||Y.S. Liao
|Issue Date:||2004||Journal Volume:||218||Start page/Pages:||1243-1253||Source:||Proceedings of the institution of mechanical engineers, Part C: Journal of mechanical science||URI:||https://scholars.lib.ntu.edu.tw/handle/123456789/589584|
|Appears in Collections:||機械工程學系|
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