https://scholars.lib.ntu.edu.tw/handle/123456789/589584
Title: | Numerical studies of variations in gap бо finger width ratio and traveled distance for the driving force of RF MEMS device using Dual BEM | Authors: | Y.S. Liao S.W. Chyuan J.T. Chen YUNN-SHIUAN LIAO |
Issue Date: | 2004 | Journal Volume: | 218 | Start page/Pages: | 1243-1253 | Source: | Proceedings of the institution of mechanical engineers, Part C: Journal of mechanical science | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/589584 |
Appears in Collections: | 機械工程學系 |
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