https://scholars.lib.ntu.edu.tw/handle/123456789/589597
Title: | An alternative efficient method (DBEM) for simulating the electrostatic field and levitating force of a MEM combdrive | Authors: | Y.S. Liao S.W. Chyuan J.T. Chen YUNN-SHIUAN LIAO |
Issue Date: | 2004 | Journal Volume: | 14 | Journal Issue: | 8 | Start page/Pages: | 1258-1269 | Source: | Journal of micromechanics and microengineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/589597 |
Appears in Collections: | 機械工程學系 |
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