https://scholars.lib.ntu.edu.tw/handle/123456789/590706
Title: | Local stress determination in Shallow Trench Insulator structures with one-side and two-sides Pad-SiN layer by Polarized micro-Raman spectroscopy extraction and mechanical modelization | Authors: | M.-H. Liao MING-HAN LIAO |
Issue Date: | 2012 | Source: | The 6th International Conference on Technological Advances of Thin Films & Surface Coatings | Description: | Singapore |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/590706 |
Appears in Collections: | 機械工程學系 |
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