|Title:||Development of a low-cost micro-CMM for 3Dmicro/nano measurements||Authors:||Fan, K.C.
|Keywords:||Micro-CMM;nanometre accuracy;arch bridge;co-planar stage;focusing probe||Issue Date:||31-Jan-2006||Publisher:||臺北市:國立臺灣大學機械工程學系||Journal Volume:||17||Journal Issue:||2006||Start page/Pages:||-||Source:||Meas. Sci. Technol||Abstract:||
A high-precision and low-cost micro-CMM (coordinate measuring machine)
is under development. The expected measuring range is 25 × 25 × 10 mm3
and the resolution is 1 nm. In order to enhance the structural accuracy, some
new ideas are integrated into the design, such as the arch-shape bridge for
better stiffness and thermal accuracy, and the co-planar stage for less Abbe
error. The linear diffraction grating interferometer and subdivision technique
is proposed for position sensing to nanometre resolution. The focusing
probe on the laser interferometer feedback spindle is structured in the Z-axis
to guarantee the nanometre stability. In this report, the detailed design
principles of the developed micro-CMM are described. The performance
evaluation of each module of the prototype micro-CMM is presented. The
positioning resolution of each axis to 1 nm can be achieved by combining
the coarse and fine motion control on a piezo-ceramic linear motor. The
Z-axis measurement can be controlled to within 15 nm repeatability. Parts
of the positioning repeatability of the co-planar stage have been achieved to
30 nm. Some problems due to current techniques will be addressed.
|Appears in Collections:||機械工程學系|
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