Pyroelectric Film Infrared Sensor

For working up a infrared sensor, I did a research on pyroelectric film sensor. The zinc oxide is fabrication on the silicon nitride. The back-etching was done by KOH wet etch. Zinc oxide is fabrication by RF Sputter. After trying different prescription and processing parameters, I fond out the good performance of sputter, film thickness, anneal, and area. This paper studies pyroelectricity, sensor design, and signal detection. And have a new technology at the electrode. Found out the field electrode sensor have good performance. The human infrared ray and near-infrared ray could be sensed by the zinc oxide pyroelectric sensor. It could be reaped manufactured and fit our goal.