A Pure CMOS Surface Machined Pressure Sensor
Resource
Proc. Int. Conf. on Precision Engineering, v. 2, p, p. 987-992
Journal
Proc. Int. Conf. on Precision Engineering
Journal Volume
v. 2
Pages
-
Date Issued
1994
Date
1994
Author(s)
P. Z. Chang
C. L. Dai
S. S. Lu
Publisher
Taipei, Taiwan:
Type
conference paper