https://scholars.lib.ntu.edu.tw/handle/123456789/611940
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Jywe W. | en_US |
dc.contributor.author | Jeng Y.-R. | en_US |
dc.contributor.author | Liu C.-H. | en_US |
dc.contributor.author | Teng Y.-F. | en_US |
dc.contributor.author | Wu C.-H. | en_US |
dc.contributor.author | Hsieh T.-H. | en_US |
dc.contributor.author | Duan L.-L. | en_US |
dc.contributor.author | Wen-Yuh Jywe | en_US |
dc.creator | Jywe W.;Jeng Y.-R.;Liu C.-H.;Teng Y.-F.;Wu C.-H.;Hsieh T.-H.;Duan L.-L. | - |
dc.date.accessioned | 2022-05-24T06:26:40Z | - |
dc.date.available | 2022-05-24T06:26:40Z | - |
dc.date.issued | 2010 | - |
dc.identifier.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84861596591&doi=10.1243%2f09544054JEM1436&partnerID=40&md5=8632082aa18f79ff9ce148c5c52a3510 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/611940 | - |
dc.description.abstract | This paper describes the successful development of a middle-range six-degrees-of-freedom stage, using the features of a flexible structure. The system includes two parts: a middlerange positioning X-Y stage and a four-degrees-of-freedom stage. The flexible structure of the four-degrees-of-freedom stage is built from two kinds of flexible bodies: circular hinges and a new two-degrees-of-freedom flexible body. The four-degrees-of-freedom stage was designed to compensate movement errors including linear displacement, pitch, and roll errors. The linear displacement reaches 20mm along the X-axis, 20mm along the Y-axis, and 5 μm along the Z-axis. The rotation angle around the X-axis (θx), Y-axis (θy), and Z-axis (θz) were all 10 arcsec. A novel six-degrees-of-freedom measuring system was also designed. Precision feedback control is demonstrated in a series of experiments performed using the proposed measurement system. ? Authors 2010. | - |
dc.relation.ispartof | Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture | - |
dc.subject | Errors | - |
dc.subject | Flexible structures | - |
dc.subject | Hinges | - |
dc.subject | Measurements | - |
dc.subject | Flexure hinge | - |
dc.subject | Four-degrees-of-freedom | - |
dc.subject | Linear displacements | - |
dc.subject | Measurement system | - |
dc.subject | Measuring systems | - |
dc.subject | Nanometres | - |
dc.subject | Piezoelectric | - |
dc.subject | Positioning control | - |
dc.subject | Degrees of freedom (mechanics) | - |
dc.title | Development of a middle-range six-degrees-of-freedom system | en_US |
dc.type | journal article | en |
dc.identifier.doi | 10.1243/09544054JEM1436 | - |
dc.identifier.scopus | 2-s2.0-84861596591 | - |
dc.relation.pages | 679-688 | - |
dc.relation.journalvolume | 224 | - |
dc.relation.journalissue | 4 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.fulltext | no fulltext | - |
item.cerifentitytype | Publications | - |
item.openairetype | journal article | - |
item.grantfulltext | none | - |
crisitem.author.dept | Mechanical Engineering | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 機械工程學系 |
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