https://scholars.lib.ntu.edu.tw/handle/123456789/611948
標題: | The Application of the Dual-Beam Laser Interferometer for Calibration Precision Machine Tools | 作者: | Liu C.-H. Jywe W.-Y. Chen I.-C. Duan L.-L. Jwo H.-H. Jeng Y.-R. Hsu T.-H. Teng Y.-F. Huang H.-L. Wang M.-S. J?ger G. Wen-Yuh Jywe |
關鍵字: | Calibration precision;Dual-beam;Laser interferometer;Laser interferometer measurements;Measurement system;Precision machine tools;Straightness measurement;Angle measurement;Interferometers;Laser interferometry;Machine tools;Measurements;Precision engineering | 公開日期: | 2009 | 卷: | 76 | 期: | 5 | 起(迄)頁: | 245-247 | 來源出版物: | Technisches Messen | 摘要: | In this paper, a dual-beam laser interferometer measurement system for precision machine tools was presented. The straightness measurement module and the angular measurement module were combined to form this measurement system such that the operations of precision machine tools, the positioning, vertical straightness, horizontal straight- ness, pitch and yaw, can be obtained. The resolution of the positioning, straightness and angle has achieved 0.1 nm, 1 nm and 0.1 arcsec, respectively. The performance of this measurement system has been proved by experiments. ?Oldenbourg Wissenschaftsverlag. |
URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-67650000197&doi=10.1524%2fteme.2009.0963&partnerID=40&md5=0ff78f607b02ea214da8fdaeffcbed95 https://scholars.lib.ntu.edu.tw/handle/123456789/611948 |
DOI: | 10.1524/teme.2009.0963 |
顯示於: | 機械工程學系 |
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