https://scholars.lib.ntu.edu.tw/handle/123456789/611958
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Jywe W.-Y. | en_US |
dc.contributor.author | Jeng Y.-R. | en_US |
dc.contributor.author | Liu C.-H. | en_US |
dc.contributor.author | Teng Y.-F. | en_US |
dc.contributor.author | Wang H.-S. | en_US |
dc.contributor.author | Fung R.-F. | en_US |
dc.contributor.author | Wen-Yuh Jywe | en_US |
dc.creator | Jywe W.-Y.;Jeng Y.-R.;Liu C.-H.;Teng Y.-F.;Wang H.-S.;Fung R.-F. | - |
dc.date.accessioned | 2022-05-24T06:26:45Z | - |
dc.date.available | 2022-05-24T06:26:45Z | - |
dc.date.issued | 2007 | - |
dc.identifier.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84863081373&partnerID=40&md5=09db2468b62dcf7452f7363edaa44c90 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/611958 | - |
dc.description.abstract | This paper concentrates on the design and manufacturing process of a flexure hinge-based stack-type 5 DOF coplanar nanometer-scale stage with high accuracy and multiple DOF. This paper uses the features of a flexible structure to develop a coplanar nanometer-scale stage with 5 DOF that allows the increase or decrease of axis action in accordance with various needs. The flexible structure of the coplanar nanometer-scale stage was included two kinds of the cylindrical flexible body and arc flexible body. The coplanar nanometer-scale stage allows for 3-translational and 2-rotational motions and is provided with eight piezoelectric actuators - one on the X-axis, another on the Y-axis, and the others on the Z-axis. The displacement characteristics of the output member of the stage were measured with the built-in capacitive sensors. ? AES-Advanced Engineering Solutions. | - |
dc.relation.ispartof | AES-ATEMA International Conference Series - Advances and Trends in Engineering Materials and their Applications | - |
dc.subject | Capacitive sensor | - |
dc.subject | Displacement characteristic | - |
dc.subject | Flexible bodies | - |
dc.subject | Flexure hinge | - |
dc.subject | Manufacturing process | - |
dc.subject | Nano-meter-scale | - |
dc.subject | Piezoelectric | - |
dc.subject | Positioning control | - |
dc.subject | Flexible structures | - |
dc.subject | Piezoelectric actuators | - |
dc.subject | Hinges | - |
dc.title | Development of a flexure hinge-based stack-type 5 DOF coplanar nanometer-scale stage | en_US |
dc.type | conference paper | en |
dc.identifier.scopus | 2-s2.0-84863081373 | - |
dc.relation.pages | 307-311 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.openairetype | conference paper | - |
item.grantfulltext | none | - |
crisitem.author.dept | Mechanical Engineering | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 機械工程學系 |
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