https://scholars.lib.ntu.edu.tw/handle/123456789/61434
Title: | A Study on Nano positioning and feedback control system in large-scale | Authors: | 范光照 Chen, Ye-jin Cheng Fang Fan Kuang-chao |
Issue Date: | 2004 | Start page/Pages: | - | Source: | International Symposium of Mechanical Measurement | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/156437 |
Appears in Collections: | 機械工程學系 |
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