A MEMS micromirror fabricated using CMOS post-process

Resource

Sensors and Actuators A: Physical 120: 573-581

Journal

Sensors and Actuators A: Physical

Journal Volume

120

Journal Issue

2

Pages

573-581

Date Issued

2005

Date

2005

Author(s)

Dai, Ching-Liang

Lee, Chi-Yuan

DOI

URI

Type

journal article

File(s)

Name

04.pdf

Size

860.43 KB

Format

Adobe PDF

Checksum

(MD5):42d353be6879ddc453fcbe2c340bf310