https://scholars.lib.ntu.edu.tw/handle/123456789/616412
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chattopadhyay S. | en_US |
dc.contributor.author | Chien S.C. | en_US |
dc.contributor.author | Chen L.C. | en_US |
dc.contributor.author | Chen K.H. | en_US |
dc.contributor.author | Lee H.Y. | en_US |
dc.contributor.author | LI-CHYONG CHEN | zz |
dc.creator | Chattopadhyay S.; Chien S.C.; Chen L.C.; Chen K.H.; Lee H.Y. | - |
dc.date.accessioned | 2022-08-09T03:50:41Z | - |
dc.date.available | 2022-08-09T03:50:41Z | - |
dc.date.issued | 2002 | - |
dc.identifier.issn | 09259635 | - |
dc.identifier.uri | https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036508105&doi=10.1016%2fS0925-9635%2801%2900606-9&partnerID=40&md5=77fc2c12f7f674986feeee954c689613 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/616412 | - |
dc.description.abstract | Thermal diffusivity (α) of free standing diamond, amorphous silicon carbon nitride (a-SiC xN y) and boron carbon nitride (a-BC xN y) thin films on crystalline silicon, has been studied using the travelling wave technique. Thermal diffusivity in all of them was found to depend on the microstructure. For a-SiC xN y and a-BC xN y thin films two distinct regimes of high and low carbon contents were observed in which the microstructure changed considerably and that has a profound effect on the thermal diffusivity. The defective C(sp)-N phase plays a key role in determining the film properties. © 2002 Elsevier Science B.V. All rights reserved. | - |
dc.language | en_US | - |
dc.relation.ispartof | Diamond and Related Materials | - |
dc.subject | Microstructure;Photoelectron spectroscopy;Physical vapour deposition;Thermal conductivity | - |
dc.subject.other | Thermal diffusivity;Microstructure;Silicon;Thin films;Diamonds;cutting tool;diamond coating;microstructure;thermal conductivity;vapor deposition | - |
dc.title | Thermal diffusivity in diamond, SiC xN y and BC xN y | en_US |
dc.type | journal article | en |
dc.identifier.doi | 10.1016/S0925-9635(01)00606-9 | - |
dc.identifier.scopus | 2-s2.0-0036508105 | - |
dc.relation.pages | 708-713 | - |
dc.relation.journalvolume | 11 | - |
dc.relation.journalissue | 3-6 | - |
item.openairetype | journal article | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.fulltext | no fulltext | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
crisitem.author.dept | Center for Condensed Matter Sciences | - |
crisitem.author.parentorg | Others: University-Level Research Centers | - |
顯示於: | 凝態科學研究中心 |
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