https://scholars.lib.ntu.edu.tw/handle/123456789/61767
DC Field | Value | Language |
---|---|---|
dc.contributor | 顏溪成 | en |
dc.contributor | 臺灣大學:化學工程學研究所 | zh_TW |
dc.contributor.author | 劉奕宏 | zh |
dc.contributor.author | Liu, Yi-Hung | en |
dc.creator | 劉奕宏 | zh |
dc.creator | Liu, Yi-Hung | en |
dc.date | 2005 | en |
dc.date.accessioned | 2007-11-26T03:51:20Z | - |
dc.date.accessioned | 2018-06-28T17:01:45Z | - |
dc.date.available | 2007-11-26T03:51:20Z | - |
dc.date.available | 2018-06-28T17:01:45Z | - |
dc.date.issued | 2005 | - |
dc.identifier | zh-TW | en |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/52209 | - |
dc.description.abstract | 本研究主要分為五個部分來探討化學機械研磨廢液的奈米顆粒去除: 第一部分為顆粒表面性質與凝聚行為受到不同溶液環境的變化;第二部分為透過DLVO理論來模擬顆粒間的作用行為與其理論驗證;第三部分電混凝過程中的處理效率研究與處理過程當中必要性參數之影響;第四部份為探討電混凝過程中相關的反應行為,與反應機制的模擬;第五部分為運用實驗規劃的過程對於奈米顆粒移除決定最佳參數以期達到最適化的處理效果。 實驗結果發現在化學機械研磨液的奈米顆粒移除上,對於濃度較高的研磨廢液而言,在電混凝反應前氯化鎂的添加可以先降低顆粒濃度以避免因濃度過高造成的電混凝電級鈍化現象,同時其氯離子的存在也可以提升後續的電混凝處理效率。根據顆粒凝聚相關實驗的結果,在化學機械研磨液之奈米顆粒凝聚行為比理論模式的估算顯得更為複雜,因此在處理上所需要注意的參數調整與控制將顯的更為重要。 對於電混凝的處理效益而言,也經由實驗發現,其過程中之曝氣,電流強度控制,混凝完後的pH值調整式顯的較為重要的,同時根據調整好的參數可以觀察到在顆粒移除可以達到約99%的處理效益。並藉由反應機制的模擬過程,探討其反應程序為第一部分的膠體奈米顆粒與鐵離子的主要反應步驟,待顆粒越過凝聚的能量障礙後再進行第二部分快速凝聚步驟。最後在根據實驗設計的法則預測本實驗所需要控制的顯著因子於電流密度大小為0.0455A/cm2,通電時間為11.3分鐘,電混凝完後之pH值調整為5~6之間會有最佳的處理效果。 | zh_TW |
dc.description.abstract | This thesis on separation between nano-particles and water in CMP wastewater by electrocoagulation has been mainly studied in five parts. The surface properties and behavior on coagulation of particles changing with various conditions were investigated in the first part of the study. Particle’s interactions were simulated and verified by DLVO modeling in the second part. Treatment efficiency affected by some important parameters and kinetic reaction modeling in the electrcoagulation process were investigated in the third and the forth part respectively. Optimization in the electrocoagulation process by experimental design was investigated in the final part of the study. According to the experimental results, I prefer to add MgCl2 for higher wastewater concentration to avoid passivation in the latter electrocoagulation(EC) process in CMP wastewater treatment. In addition, the left chloride anion was beneficial in the latter EC process. The behavior on coagulation between particles in CMP wastewater is more complicated than assessed by DLVO theory and it is more important on parameters controlling in the EC process. It was found aeration, current density, and pH controlling after EC treatment are necessary in the EC process and almost 99% of particle removal efficiency was achieved by proper conditions in the treatment. It was also found particles and Fe3+ ions react in the first main reaction and then particles coagulate together rapidly in the second reaction by the kinetic modeling. Finally, the optimum parameters were determined by experimental design and the optimum parameters in the EC treatment including : 0.0455 A/cm2, 11.3 minutes during EC treatment, and pH controlling between 5~6 after EC treatment. | en |
dc.description.tableofcontents | 摘要 I 英文摘要 II 目錄 IV 圖表目錄 VI 第一章 緒論 1 1-1 半導體水資源課題簡介 1 1-2 化學機械研磨 1 1-3 化學機械研磨液介紹 4 1-4 半導體水資源回收上所遭遇的困難與瓶頸 6 1-5 研究目的與動機 9 第二章 文獻回顧 10 2-1 電混凝技術得介紹與應用 10 2-2 電混凝技術在半導體工業的發展與應用 15 2-3 電混凝過程中動力學行為上的探討研究 18 第三章 理論分析與技術介紹 24 3-1 混凝技術與機制 24 3-1-1 奈米粉體型態與團聚原理 24 3-1-2 膠體化學與混凝理論 27 3-1-3 電混凝技術與高級氧化程序介紹 29 3-1-4 電雙層與DLVO理論 30 3-2 儀器分析原理及應用 40 3-2-1 Zetapotential量測原理 40 3-2-2 顆粒粒徑量測原理 43 3-2-3 ICP(Induced coupled plasma)感應偶合電漿原理介紹 44 3-2-4 濁度量測原理介紹 45 第四章 實驗設備與方法 47 4-1 電混凝實驗項目與程序 47 4-2 實驗裝置 51 4-3 實驗藥品 52 第五章 結果與討論 54 5-1 CMP研磨液奈米顆粒性質與凝聚理論 54 5-1-1 CMP研磨液中顆粒粒徑與表面電為分析 54 5-1-2 DLVO理論驗證與探討 74 5-2 CMP研磨廢液處理之電混凝系統分析 86 5-2-1 電混凝程序與效益評估 86 5-2-2 電混凝動力機制得探討 96 5-2-3 電混凝程序最佳條件配置 100 第六章 結論 111 6-1 研究總結 111 6-2 未來研究的延伸性及發展 113 符號說明 114 參考文獻 116 附錄 120 | zh_TW |
dc.format.extent | 3533182 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language | zh-TW | en |
dc.language.iso | en_US | - |
dc.subject | 化學機械研磨廢液 | en |
dc.subject | 電混凝 | en |
dc.subject | 顆粒間的作用行為 | en |
dc.subject | 顆粒移除 | en |
dc.subject | CMP wastewater | en |
dc.subject | electrocoagulation | en |
dc.subject | particle removal | en |
dc.title | 以電混凝法處理化學機械研磨廢液與研磨液中顆粒凝聚行為之特性研究 | zh |
dc.title | Electrocoagulation on CMP Wastewater Treatment and The Behavior of Particle Coagulation | en |
dc.type | thesis | en |
dc.identifier.uri.fulltext | http://ntur.lib.ntu.edu.tw/bitstream/246246/52209/1/ntu-94-R92524046-1.pdf | - |
dc.relation.reference | Bard, A. J. and L. R. Faulkner, “Electrochemical Methodes”,2nd Ed.,John Wiley & Sons, Inc., New York, (2001). Beck, E.C., Giannini, A.P., Ramirez, E.R., Food Technol., 22, 18–19 (1974). Belongia, B. M., Haworth, P. D., Baygents, J. C., Raghavan, S., J. Electrochem. Soc., 146, 4124-4130 (1999). Bignon, J., Brochard, P., Brown, R., Davis, J. M. G., Vu, V., Gibbs, G., Greim, M., Oberdörster, G., Sébastien, P., The Annals of Occupational Hygiene ,39, 89-106 (1995). Chen, X., Chen, G., Po, L. Y., Sep. Purif. Technol., 19, 65-76 (2000). Dick, C. A. J., Stone, V., Brown, D.M., Watt, M., Cherrie, J.W., Howarth, S., Seaton, A., Donaldson, K., Atmospheric Environment, 34, 2587-2592 (2000). Den, W., Huang, C., Colloids and Surfaces A, 254, 81-89 (2005). Donaldson, K., Li, X.Y., MacNee, W., Journal of Aerosol Science, 29, 553-560 (1998). Donini, J. C., Kan, J., Szynkarczuk, J., Hassan, T. A., Kar, K. L., The Canadian Journal of Chemical Engineering, 72, 1007-1012 (1994). Feng, C., Sugiura, N., Shimada, S., Maekawa, T., J. Hazardous Materials, B103, 65-78 (2003). Foley, R. T., Corrosion, 42, 277-288 (1986). Golden, J. H., Small, R., Pagan, L., Shang, C., Raghavan, S., Semiconductor International, Oct., 85-98 (2000) Han, M., Song, J., Kwon, A., Wat. Sci. Tech., 2, No5-6, 73-76 (2002). Holt, P. K., Barton, G.. W., Mitchell, C. A., The Third Australian Environmental Enggeneering Research Event, 23-26 November Castlemaine, Victoria, (1999). Holt, P. K., Barton, G.. W., Wark, M., Mitchell, C. A., Colloids and Surfaces A, 211, 233-248 (2002). Hu, C. Y., Lo, S. L., Kuan, W. H., Water Research, 37, 4513-4523 (2003). Hunter, R. J., “Foundations of colloid science”, Oxford University Press, Inc., New York, (1987). Hunter, R. J., “Introduction to Modern Colloid Science”, Oxford University Press, Inc., New York, (1993). Johnson, P. K., Amirtharajah, A., J. the American Water Works Association, 75, 232-239 (1983). Khristoskova, S., Chem. Abstr., 22, 177–185 (1984). Kobya, M., Can, O. T., Bayramoglu, M., J. Hazad. Mater., B100, 163-178 (2003). Koparal, A.S., Ogutveren, U.B., J. Hazard. Mater., B89, 83–94 (2002). Kumar, P. R., Chaudhari, S., Khilar, K. C., Mahajan, S. P., Chemosphere, 55, 1245-1252 (2004). Lai, C. L., Lin, S. H., Chemical Enineering Journal, 95, 205-211 (2003). Larue, O., Vorobiev, E., Int. J. Miner. Process, 71, 1-15 (2003). Lin, S. H., Kiang, C. D., J. Hazad. Mater., B97, 159-171 (2003). Mameri, N., Yeddou, A. R., Lounici, H., Belhocine, D., Grib, H., Bariou, B., Water Reaserch, 32, 604-612 (1998). Matteson, M. J., Dobson, R. L., Glenn, r. W., Kukunoor, N. S., Waits, W. H., Clayfield, E. J., Colloids and Surfaces A, 104, 101-109 (1995). Mitchell, J. K., “Fundementals of Soil Behavior”, John Wiley & Sons, Inc., New York, (1976). Mills, D., J. Am. Water Works Assoc., 92, 35–43 (2000). Mollah, M. Y. A., Schennach, R., Parga, J., Cocke, D. L., J. Hazard. Mater., B84, 29-41 (2001). Oberdörster, G., Ferin, J., Finkelstein, J., Baggs, R., Stavert, D.M., Lehnert, B. E., SAE Technical Paper Series, 921388, 1-15 (1992). Pazenko, T. Ya., Khalturina T. I., Kolova, A. F., Rubailo I. S., J. Appl. Chem. USSR, 60, 2383-2387 (1985). Philips, V. A.; Kolbe, J. L.; Colloid Interface Science. 4, 169-176 (1976). Pouet, M. F., Grasmick, A., Water Sci. Technol., 31, No.3-4, 275-283 (1995). Przhegorlinskii, V. I., Ivanishvili, A. I., Kalinichenko, T. D., Khymiya i Technologiya Vody, 9(5), 468-469 (1987). Russell, R. R., Energy Progress, 8, 205-208 (1988). Szynkarczuk, J., Kan, J., Hassan, A. T. T., Donini, J. C., Clays and Clay Minerals, 42, 667-673 (1994). Vik, E. A., Carlson, D. A., Eikum, A. S., Gjessing, E. T., Water Res., 18, 1355-1360 (1984). Yang, G. C. C., Environmental Progress, 21, No.1, 57-62 (2002). 楊萬發, “水及廢水處理化學” ,茂昌圖書有限公司 (1982) 台北。 王建榮,林慶福,林必窕, “半導體平坦化技術” ,全華科技圖書股份有限公 司 (1999) 台北。 張有義,郭蘭生, “膠體及界面化學入門” ,高立圖書有限公司 (2002) 台北 李玲, “表面活性劑與奈米技術” ,化學工業出版社 (2003) 北京。 | zh_TW |
item.languageiso639-1 | en_US | - |
item.cerifentitytype | Publications | - |
item.fulltext | with fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_46ec | - |
item.openairetype | thesis | - |
item.grantfulltext | open | - |
Appears in Collections: | 化學工程學系 |
File | Description | Size | Format | |
---|---|---|---|---|
ntu-94-R92524046-1.pdf | 23.53 kB | Adobe PDF | View/Open |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.