https://scholars.lib.ntu.edu.tw/handle/123456789/62260
Title: | Microstructures for Measuring Residual Strains of CMOS Thin Film | Authors: | Chang, P. Z. Dai, C. L. Lu, S. S. |
Issue Date: | Nov-1997 | Journal Volume: | v. 2 | Start page/Pages: | 981-986 | Source: | Proc. Int. Conf. Precision Engineering | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/156614 |
Appears in Collections: | 機械工程學系 |
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