https://scholars.lib.ntu.edu.tw/handle/123456789/62260
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chang, P. Z. | zh-TW |
dc.contributor.author | Dai, C. L. | zh-TW |
dc.contributor.author | Lu, S. S. | zh-TW |
dc.creator | Chang, P. Z.; Dai, C. L.; Lu, S. S. | zh-TW |
dc.date | 1997-11 | en |
dc.date.accessioned | 2009-05-15T13:40:24Z | - |
dc.date.accessioned | 2018-06-28T17:04:16Z | - |
dc.date.available | 2009-05-15T13:40:24Z | - |
dc.date.available | 2018-06-28T17:04:16Z | - |
dc.date.issued | 1997-11 | - |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/156614 | - |
dc.language | en | en |
dc.language.iso | en_US | - |
dc.relation | Proc. Int. Conf. Precision Engineering, v. 2, pp. 981-986 | en |
dc.relation.ispartof | Proc. Int. Conf. Precision Engineering | - |
dc.title | Microstructures for Measuring Residual Strains of CMOS Thin Film | en |
dc.type | conference paper | en |
dc.relation.pages | 981-986 | - |
dc.relation.journalvolume | v. 2 | - |
item.languageiso639-1 | en_US | - |
item.fulltext | no fulltext | - |
item.grantfulltext | none | - |
item.openairetype | conference paper | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.cerifentitytype | Publications | - |
顯示於: | 機械工程學系 |
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