Fabrication of free-space MOEM Device by CMOS Process

Resource

Tamkang Journal of Science and Engineering 7 (2): 73-76

Journal

Tamkang Journal of Science and Engineering

Journal Volume

7

Journal Issue

2

Pages

73-76

Date Issued

2004

Date

2004

Author(s)

Lee, Chi-Yuan

Dai, Ching-Liang

Chen, Wen-Jong

URI

Type

journal article