https://scholars.lib.ntu.edu.tw/handle/123456789/62344| Title: | Fabrication of free-space MOEM Device by CMOS Process | Authors: | Cheng, Ying-Chou Lee, Chi-Yuan Dai, Ching-Liang Chen, Wen-Jong Chang, Pei-Zen Chen, Ping-Hei |
Issue Date: | 2004 | Journal Volume: | 7 | Journal Issue: | 2 | Start page/Pages: | 73-76 | Source: | Tamkang Journal of Science and Engineering | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/85698 |
| Appears in Collections: | 機械工程學系 |
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