https://scholars.lib.ntu.edu.tw/handle/123456789/62383
Title: | In-situ Monitoring of Silicon Membrane Thickness during Wet Etching Using a SAW Sensor | Authors: | Lee, Chi-Yuan Cheng, Ying-Chou Wu, Tsung-Tsong Chen, Yung-Yu Chen, Wen-Jong Pao, Shih-Yung Chang, Pei-Zen Chen, Ping-Hei |
Issue Date: | 2004 | Journal Issue: | 43 | Start page/Pages: | 3611-3617 | Source: | Japanese Journal of Applied Physics | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/85706 |
Appears in Collections: | 機械工程學系 |
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