Feasibility study of modular plant for 300 mm-IC fabrications

Resource

Journal of Intelligent Manufacturing 15 (2): 233-244

Journal

Journal of Intelligent Manufacturing

Journal Volume

15

Journal Issue

2

Pages

233-244

Date Issued

2004

Date

2004

Author(s)

Hsieh, S.

Hung, C.-R.

URI

Type

journal article

File(s)

Name

02.pdf

Size

319.79 KB

Format

Adobe PDF

Checksum

(MD5):005c2ba03c8b90b7a587f94f216ce2dc