DC 欄位 | 值 | 語言 |
dc.contributor | 李志中 | zh-TW |
dc.contributor | Lee, Jyh-Jone | en |
dc.contributor | 臺灣大學:機械工程學研究所 | zh-TW |
dc.contributor.author | 林耀馨 | zh-TW |
dc.contributor.author | Lin, Yao-Zhin | en |
dc.creator | 林耀馨 | zh-TW |
dc.creator | Lin, Yao-Zhin | en |
dc.date | 2009 | en |
dc.date.accessioned | 2010-06-30T09:34:58Z | - |
dc.date.accessioned | 2018-06-28T17:34:00Z | - |
dc.date.available | 2010-06-30T09:34:58Z | - |
dc.date.available | 2018-06-28T17:34:00Z | - |
dc.date.issued | 2009 | - |
dc.identifier.other | U0001-1607200909455100 | en |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/187215 | - |
dc.description.abstract | 本論文之目的為改善晶圓盒門體閂鎖機構之磨耗,以保持晶圓盒內為高潔淨度,確保不會對積體電路製程產生污染,而降低了產品製程良率。本研究應用田口方法求取晶圓盒門體閂鎖機構之磨耗的最佳因子組合。田口方法在產品或製程設計時就有考慮雜訊對品質特性的影響,亦即能降低產品的變異,使得產品或製程更具穩健性。田口方法使用訊號雜訊比及變異數分析來探討各因子對於晶圓盒門體閂鎖機構之磨耗的影響程度。本研究中所探討的因子為導引件曲線、從動件滾子直徑、凸輪基圓半徑、凸輪升程角度、凸輪升程曲線、凸輪降程曲線、凸輪前端暫停角度及凸輪後端暫停角度。實驗結果顯示磨耗主要受凸輪基圓半徑與凸輪升程曲線兩個重要因子的影響。本研究設計的最佳因子組合,其實驗結果顯示磨耗有明顯的改善。 | zh-TW |
dc.description.abstract | The purpose of this study is to investigate the wear of the latching mechanism used in the wafer container door. The wafer container provides the wafers a highly clean mini-environment for storage and transporting such that they will not be contaminated during the manufacturing process. This research discusses parameter optimization of the latching mechanism for the wafer container door by Taguchi method based design of experiments to understand how the variation in product specifications affects the system performance. Taguchi method is the robust design that enables the designer to find the optimum combination of control parameters to make the response insensitive to noise factors. The method uses signal to noise ratio and analysis of variance to investigate the contribution of each factor to wear of the latching mechanism for the wafer container door. In the method, eight control factors:curve of guide, radius of roller follower, radius of base circle, cam angle for rise, cam profile for rise, cam profile for return, cam angle for forward dwell, and cam angle for backward dwell are considered. Experimental results demonstrate wear is mainly affected by the factors of radius of base circle and cam profile for rise. The results also show that a distinct improvement over the wear of the latching mechanism can be achieved. | en |
dc.description.tableofcontents | 中文摘要 i文摘要 ii錄 iii目錄 v目錄 vii一章 緒論 1 1.1 前言 1 1.2 文獻回顧 2.2.1 晶圓盒門體閂鎖機構之文獻回顧 2.2.2 田口式品質工程之文獻回顧 4 1.3研究動機與目的 5 1.4 本文架構 6二章 田口式品質工程 7 2.1 田口方法與品質改善 7 2.1.1 穩健設計之理念 7 2.1.2 品質損失 8 2.2 田口實驗設計 11.2.1 選定品質特性 13 2.2.2 因子分類 13.2.3 直交表應用 16 2.2.4 計算S/N比 19.2.5 評估因子效應 22.2.6 變異數分析 23 2.2.7 確認實驗 25三章 閂鎖機構之實驗規劃 27 3.1 晶圓盒門體之閂鎖機構 27.1.1 簡介晶圓盒門體之閂鎖機構 27 3.1.2 閂鎖機構之作動 29 3.1.3 閂鎖機構之功用 30 3.2 實驗規劃 30.2.1 選定品質特性 32 3.2.2 選定因子及其水準 32.2.3 直交表應用 40四章 實驗與分析 42 4.1 實驗設備架設 42.2 實驗器材與設備 44 4.3 實驗步驟 50 4.4 實驗結果 51 4.5 實驗分析 52.5.1 計算S/N比 52.5.2 評估因子效應 54.5.3 變異數分析 56 4.5.4 最佳因子組合 61.6 確認實驗 61.7 原因子組合與最佳因子組合之比較 62 4.8 各因子對磨耗現象之分析與討論 64五章 結論與未來研究方向 69 5.1 結論 69 5.2 未來研究方向 70amp;#21442;考文獻 71 | en |
dc.format.extent | 1765723 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language | zh-TW | en |
dc.language.iso | en_US | - |
dc.subject | 磨耗 | zh-TW |
dc.subject | 田口方法 | zh-TW |
dc.subject | 穩健 | zh-TW |
dc.subject | 訊號雜訊比 | zh-TW |
dc.subject | 變異數分析 | zh-TW |
dc.subject | wear | en |
dc.subject | latching mechanism | en |
dc.subject | Taguchi method | en |
dc.subject | robust design | en |
dc.subject | signal of noise ratio | en |
dc.subject | analysis of variance | en |
dc.title | 應用田口方法於晶圓盒門體閂鎖機構之磨耗分析 | zh-TW |
dc.title | Application of Taguchi Method in Wear Analysis of Latching Mechanism For the Wafer Container Door | en |
dc.type | thesis | en |
dc.identifier.uri.fulltext | http://ntur.lib.ntu.edu.tw/bitstream/246246/187215/1/ntu-98-R96522616-1.pdf | - |
item.fulltext | with fulltext | - |
item.languageiso639-1 | en_US | - |
item.openairecristype | http://purl.org/coar/resource_type/c_46ec | - |
item.cerifentitytype | Publications | - |
item.openairetype | thesis | - |
item.grantfulltext | open | - |
顯示於: | 機械工程學系
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