https://scholars.lib.ntu.edu.tw/handle/123456789/65891
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Young, H.T. | en |
dc.contributor.author | Liao, H.T. | en |
dc.contributor.author | Huang, H.Y. | en |
dc.contributor.author | YoungHT | - |
dc.creator | Young, H.T.; Liao, H.T.; Huang, H.Y. | en |
dc.date | 2004 | en |
dc.date.accessioned | 2008-11-11T12:36:21Z | - |
dc.date.accessioned | 2018-06-28T17:36:17Z | - |
dc.date.available | 2008-11-11T12:36:21Z | - |
dc.date.available | 2018-06-28T17:36:17Z | - |
dc.date.issued | 2004 | - |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/86444 | - |
dc.format | application/pdf | en |
dc.format.extent | 761329 bytes | - |
dc.format.mimetype | application/pdf | - |
dc.language | en | en |
dc.language.iso | en_US | - |
dc.relation | International Journal of Advanced Manufacturing Technology 29 (3-4): 372-378 | en |
dc.relation.ispartof | International Journal of Advanced Manufacturing Technology | - |
dc.title | Surface integrity of silicon wafers in ultra precision machining | en |
dc.type | journal article | en |
dc.relation.pages | 372-378 | - |
dc.relation.journalissue | 29 | - |
dc.identifier.uri.fulltext | http://ntur.lib.ntu.edu.tw/bitstream/246246/86444/1/05.pdf | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.languageiso639-1 | en_US | - |
item.grantfulltext | open | - |
item.cerifentitytype | Publications | - |
item.fulltext | with fulltext | - |
crisitem.author.orcid | 0000-0002-8866-7648 | - |
顯示於: | 機械工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。