https://scholars.lib.ntu.edu.tw/handle/123456789/65922
Title: | On-Wafer Characterization of Thermomechanical Properties of Isotropic Thin Films Deposited on Anisotropic Substrates | Authors: | Wu, Liang-Chieh Chou, Yuan-Fang |
Issue Date: | 2008 | Journal Volume: | 47 | Journal Issue: | 7 | Start page/Pages: | 5623-5629 | Source: | Japanese Journal of Applied Physics | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/86478 |
Appears in Collections: | 機械工程學系 |
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