應用於互補式金屬氧化物半導體微機電共振元件之單晶圓無接合真空封裝技術

Project title

應用於互補式金屬氧化物半導體微機電共振元件之單晶圓無接合真空封裝技術

Internal ID

109-2221-E-002-099-

Principal Investigator

Start Date

August 1, 2020

End Date

July 31, 2021

Partner Organizations

National Science and Technology Council