https://scholars.lib.ntu.edu.tw/handle/123456789/67917
Title: | 微型三次元量測儀之系統整合與軟體開發 System Integration and Software Development of Micro Coordinate Measuring Machine |
Authors: | 葉俊寬 Ye, Jyun-Kuan |
Keywords: | 微型三次元量測儀;共平面平台;機械原點;線性光柵干涉儀;軌跡控制;Micro-CMM;Co-planar stage;Machine origin;LDGI;Contour Control | Issue Date: | 2011 | Abstract: | 本研究為進行微型三次元量測儀之系統整合,將量測儀各自完成之硬體加以整合,並建立一套三次元軟體配合使用,最後進行微型三次元量測儀的實際量測,以實現微型三次元量測儀的建立為目標。 文中將介紹微型三次元量測儀之各硬體部分,包括共平面平台、Z軸、探頭及感測器,感測器包含作為機械原點、背隙補償的DVD讀取頭,以及作為位置回授的線性繞射光柵干涉儀 (LDGI)。 本研究透過自調式類神經PID控制器以控制超音波馬達,進行三軸之大小行程驅動,以及各種軌跡控制;利用雷射干涉儀進行量測儀之精度校正,並使用四象限感測器進行光軸校準,最後建立補償表以提升量測儀之精度;軟體部分則以Borland C++ Builder 6建立基本元件之量測、座標轉換,以及配合掃描式觸發探頭之觸發訊號判斷程式等功能;各元件準備完整後,進行量測儀之實際量測。 This research proceeds the system integration of micro coordinate measuring machine (Micro-CMM). All parts of Micro-CMM which were developed themselves are integrated together. And a set of CMM software is developed to be used. Finally, the measurement of Micro-CMM is proceeded. Achieving the establishment of Micro-CMM is set as the target in this research. Each part of Micro-CMM would be introduced in the paper, including Co-planar stage, Z axis, probe and all the sensors. Sensors are DVD pick-up heads for machine origins and backlash compensation, and laser diffraction grating interferometer (LDGI) as position feedback. In this research, ultrasonic motor is controlled by self-tuning neuro-PID controller to drive three axes with large and small stroke, and even any contour control. Laser interferometer is used as calibration of Micro-CMM, and quadrant photo detector is used to align the optical axes. Finally, Mapping-Error is established to promote the precision of Micro-CMM. And the functions for measurement of basic elements, coordinate transformation and trigger judgment of the scanning trigger probe are developed with the Borland C++ Builder 6 software. After all the component prepared, proceed the actual measurement of Micro-CMM. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/255886 |
Appears in Collections: | 機械工程學系 |
File | Description | Size | Format | |
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ntu-100-R98522723-1.pdf | 23.54 kB | Adobe PDF | View/Open |
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