An alternatively efficient method (DBEM) for simulating the electrostatic field and levitating force of a MEMS combdrive

Resource

J. Micromechanics and Microengineering 14 (8): 1258-1269

Journal

Journal of Micromechanics and Microengineering

Journal Volume

14

Journal Issue

8

Pages

1258-1269

Date Issued

2004

Date

2004

Author(s)

Liao, Y.S.

Chyuan, S.W.

Chen, J.T.

URI

Type

journal article

File(s)

Name

33.pdf

Size

701.18 KB

Format

Adobe PDF

Checksum

(MD5):fc42c6557422769ab7a206fcc1a74399