https://scholars.lib.ntu.edu.tw/handle/123456789/68277
Title: | An alternatively efficient method (DBEM) for simulating the electrostatic field and levitating force of a MEMS combdrive | Authors: | Liao, Y.S. Chyuan, S.W. Chen, J.T. LiaoYS |
Issue Date: | 2004 | Journal Volume: | 14 | Journal Issue: | 8 | Start page/Pages: | 1258-1269 | Source: | Journal of Micromechanics and Microengineering | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/86991 |
Appears in Collections: | 機械工程學系 |
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