Project title
低壓電漿製程之分析
Internal ID
96-2218-E-002-039-
Principal Investigator
Start Date
October 1, 2007
End Date
July 31, 2008
Partner Organizations
低壓電漿製程之分析
Keywords
電漿診斷
光譜分析
阻抗
靜電探針
Plasma Diagnostics
optical emission spectrometry
impedance measurements
langmuir probe