低溫電漿診斷及數值模擬與其在材料製程上之應用

Project title

低溫電漿診斷及數值模擬與其在材料製程上之應用

Internal ID

97-2221-E-002-098-

Principal Investigator

JERRY CHENG-CHE HSU

Start Date

August 1, 2008

End Date

July 31, 2009

Partner Organizations

National Science and Technology Council