Project title
應用於奈米微影之最佳化光學頭
Internal ID
95-2218-E-002-055-
Principal Investigator
Start Date
August 1, 2006
End Date
July 31, 2007
Partner Organizations
應用於奈米微影之最佳化光學頭
Keywords
奈米微影
表面電漿
光學頭
最佳化
近場光學
nanolithography
surface plasmon
optical head
optimization
near field