An Innovative Micro/nano Probe Measurement System for 3D Profile of Microstructure
Resource
China ACTA METROLOGICA SINICA(J),27(1),12-17.
Journal
China ACTA METROLOGICA SINICA(J)
Journal Volume
27
Journal Issue
1
Pages
12-17
Date Issued
2006-05
Date
2006-05
Author(s)
Chen, Y. J.
Fan, K. C.
Liu, Y. S.
Type
journal article