https://scholars.lib.ntu.edu.tw/handle/123456789/70280| Title: | A circular micromirror array fabricated by a maskless post-CMOS process | Authors: | Cheng, Y.-C. Dai, C.-L. Lee, C.-Y. Chen, Ping-Hei Chang, P.-Z. |
Issue Date: | Jun-2005 | Journal Issue: | 11 | Start page/Pages: | 444-451 | Source: | Microsystem Technologies | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/222380 |
| Appears in Collections: | 機械工程學系 |
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