A circular micromirror array fabricated by a maskless post-CMOS process
Resource
Microsystem Technologies,11,444-451.
Journal
Microsystem Technologies
Journal Issue
11
Pages
444-451
Date Issued
2005-06
Date
2005-06
Author(s)
Cheng, Y.-C.
Dai, C.-L.
Lee, C.-Y.
Chen, Ping-Hei
Chang, P.-Z.
Type
journal article