https://scholars.lib.ntu.edu.tw/handle/123456789/70290| Title: | A MEMS micromirror fabricated using CMOS postprocess | Authors: | Cheng, Y.-C. Dai, C.-L. Lee, C.-Y. Chen, Ping-Hei Chang, P.-Z. |
Issue Date: | May-2005 | Journal Issue: | 120 | Start page/Pages: | 573-581 | Source: | Sensors and Actuators A, Physical | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/222397 |
| Appears in Collections: | 機械工程學系 |
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