A MEMS micromirror fabricated using CMOS postprocess
Resource
Sensors and Actuators A, Physical,120,573-581.
Journal
Sensors and Actuators A, Physical
Journal Issue
120
Pages
573-581
Date Issued
2005-05
Date
2005-05
Author(s)
Cheng, Y.-C.
Dai, C.-L.
Lee, C.-Y.
Chen, Ping-Hei
Chang, P.-Z.
Type
journal article