https://scholars.lib.ntu.edu.tw/handle/123456789/70290
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Cheng, Y.-C. | en |
dc.contributor.author | Dai, C.-L. | en |
dc.contributor.author | Lee, C.-Y. | en |
dc.contributor.author | Chen, Ping-Hei | en |
dc.contributor.author | Chang, P.-Z. | en |
dc.creator | Cheng, Y.-C.; Dai, C.-L.; Lee, C.-Y.; Chen, Ping-Hei; Chang, P.-Z.; | en |
dc.date | 2005-05 | en |
dc.date.accessioned | 2011-02-11T03:35:40Z | - |
dc.date.accessioned | 2018-06-28T18:23:58Z | - |
dc.date.available | 2011-02-11T03:35:40Z | - |
dc.date.available | 2018-06-28T18:23:58Z | - |
dc.date.issued | 2005-05 | - |
dc.identifier.uri | http://ntur.lib.ntu.edu.tw//handle/246246/222397 | - |
dc.language.iso | en_US | - |
dc.relation | Sensors and Actuators A, Physical,120,573-581. | en |
dc.relation.ispartof | Sensors and Actuators A, Physical | - |
dc.title | A MEMS micromirror fabricated using CMOS postprocess | en |
dc.type | journal article | en |
dc.relation.pages | 573-581 | - |
dc.relation.journalissue | 120 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_6501 | - |
item.openairetype | journal article | - |
item.languageiso639-1 | en_US | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
顯示於: | 機械工程學系 |
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