https://scholars.lib.ntu.edu.tw/handle/123456789/70649| Title: | Feasibility study of modular-based 300 mm IC fabrication facilities | Authors: | Hsieh, S. Hung, C.-R. |
Issue Date: | 2004 | Journal Volume: | 15 | Journal Issue: | 2 | Start page/Pages: | 233-244 | Source: | Journal of Intelligent Manufacturing | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/223032 |
| Appears in Collections: | 機械工程學系 |
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