https://scholars.lib.ntu.edu.tw/handle/123456789/70990
Title: | A micromirror module using a MEMS digital-to-analog converter and its application for optical surface profiling | Authors: | Liao, Hsin-Hung YAO-JOE YANG |
Issue Date: | 2010 | Start page/Pages: | 105009 | Source: | Journal of Micromechanics and Microengineering | URI: | http://ntur.lib.ntu.edu.tw//handle/246246/244254 | DOI: | 10.1088/0960-1317/20/10/105009 |
Appears in Collections: | 機械工程學系 |
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