Co3Pt合金薄膜之顯微結構與磁性質研究
Study of microstructures and magnetic properties of Co3Pt alloy thin film
Date Issued
2007
Date
2007
Author(s)
Hsu, Shang-Lin
DOI
zh-TW
Abstract
Abstract
Pt underlayer is deposited on the 1737 Corning glass by DC magnetron sputtering, then the Co3Pt film which possess high magnetocrystalline anisotropy is deposited on the Pt layer . In order to avoid oxidation, the Pt capped layer is deposited on the Co3Pt/Pt/Glass film as the protecting layer. In this study, we investigated the effects of Pt underlayer thickness and Co3Pt thickness on the microstructure and magnetic properties of Co3Pt/Pt/Glass film with or without Pt capped layer.
From the microstructure analysis of XRD and TEM, it is found that the Pt underlayer possess (111) preferred orientation. The magnetic easy axis of Co3Pt film is transferred from in-plane to out-of-plane as Pt (111) under layer is added, due to the epitaxy between Pt (111) and CoPt (002) films. The M-H loops analysis of Co3Pt/Pt /Glass with or without Pt capped layer show that the Co3Pt/Pt/Glass films without Pt capped layer have much larger magnetic perpendicular anisotropy than that with Pt capped layer. After the Co3Pt (14 nm)/Pt (200 nm)/Glass film without Pt capped layer is annealed at 300℃ for 30 minutes, the Hc⊥, Ms , and S⊥ are 3800 Oe, 651 emu/cm3, and 0.923, respectively. It has significant potential to be applied as the perpendicular magnetic recording medium.
Subjects
Co3Pt薄膜
磊晶作用
Co3Pt film
epitaxy
Type
thesis
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