https://scholars.lib.ntu.edu.tw/handle/123456789/73414
標題: | Reduction of Grain Size and Ordering Temperature in L10 FePt Thin Films | 作者: | Sun, A.C. Chen, S.C. Kuo, P.C. Chou, C.Y. Fang, Y.H. Hsu, Jen-Hwa Huang, H.L. Chang, H.W. |
關鍵字: | Grain size;order–disorder transformations;sputtering. | 公開日期: | 十月-2005 | 出版社: | Taipei:National Taiwan University Dept Chem Engn | 卷: | VOL. 41 | 期: | NO. 10 | 起(迄)頁: | - | 來源出版物: | IEEE TRANSACTIONS ON MAGNETICS | 摘要: | Single-layer polycrystalline Fe52Pt48 alloy thin films were deposited on preheated natural-oxidized (100) silicon wafer b y conventional sputtering method at room temperature. The as-deposited films are soft fcc FePt phase. After suitable temperature annealing and furnace cooling, the as-deposited films are transformed from disordered soft fcc FePt phase into ordered fct 10 FePt phase. The ordering temperature of 10 FePt phase could be reduced to about 350 C by preheating substrate to 300 C followed by furnace cooling treatment. The grain size of FePt was found to decrease as the ordering temperature of 10 FePt phase was reduced. After annealing at 350 C for 1 h, the in-plane coercivity ( ) of the 100-nm Fe52Pt48 alloy thin film is about 6 kOe, and the average grain size is about 6 nm. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/200611150121272 | 其他識別: | 246246/200611150121272 |
顯示於: | 材料科學與工程學系 |
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