Repository logo
  • English
  • 中文
Log In
Have you forgotten your password?
  1. Home
  2. College of Engineering / 工學院
  3. Materials Science and Engineering / 材料科學與工程學系
  4. CoPt及(CoPt)1-y(SiNx)y薄膜的製作與磁性質研究
 
  • Details

CoPt及(CoPt)1-y(SiNx)y薄膜的製作與磁性質研究

Fabrication and magnetic properties of CoPt and (CoPt)1-y(SiNx)y thin films

Date Issued
2007
Date
2007
Author(s)
Lin, Pai-Li
DOI
zh-TW
URI
http://ntur.lib.ntu.edu.tw//handle/246246/55282
Abstract
Co50Pt50 films were deposited at room temperature by dc magnetron sputtering, and were combined with MgO underlayer, Ag underlayer, and SiNx capped layer to form Co50Pt50/MgO, Co50Pt50/Ag, SiNx/Co50Pt50/Ag, and (Co50Pt50)1-x(SiNx)x/Ag multilayer films on glass substrates. The effects of MgO underlayer, Ag underlayer, SiNx capped layer, and process parameters on the microstructure, magnetic properties, and magnetic easy axis of the film were investigated. For the fabrication of MgO underlayer with MgO(200) preferred orientation, the process parameters are 20 sccm Ar flow rate, 5 mTorr Ar pressure, 150 w rf power, and 360 nm film thickness. For the CoPt (20 nm)/ MgO (360 nm) films, the the effect of MgO(200) underlayer on the epitaxial growth of CoPt layer is not obvious due to the rough interface between CoPt and MgO and the diffusion of Co and Pt atoms into MgO underlayer during heat treatment. It can not make the magnetic easy axis of CoPt perpendicular to the film plane. For the CoPt/Ag films, the introduction of Ag underlayer could lower the ordering temperature of CoPt film. The ordering temperature decreases from 650°C of single-layered CoPt to 500~550°C and Ag underlayer has the effect of promoting out-of-plane magnetic properties of CoPt films. After annealing at 650°C for 30 minutes, the CoPt (20nm)/ Ag (25 nm) film shows best out-of-plane magnetic properties and its Hc⊥ value = 13000 Oe, Hc∥ value = 12300 Oe, Ms value = 420 emu/cm3, S⊥ = 0.9, and S∥ value= 0.38. A 32 nm SiNx capped layer was deposited on the top of CoPt/Ag film then annealed at 650°C for 30 minutes. The I001 /I111 ratio of CoPt (20 nm)/ Ag (25 nm) film decreases from 13.05 without SiNx capped layer to 1.54 with SiNx capped layer. Its Hc⊥ value = 11600 Oe, Hc∥ value = 9900 Oe, Ms value = 520 emu/cm3, S⊥ = 0.88, and S∥ value= 0.41. It was found that SiNx capped layer would inhibit CoPt(001) orientation growth and promote CoPt(111) preferred orientation. After annealing at high temperature, SiNx capped layer could reduce the oxidation of CoPt film, and the Ms value of the film was enhanced from 420 emu/cm3 to 520 emu/cm3. After annealing at 650°C and 700°C for 30 minutes, it is found that SiNx will limit the out-of-plane magnetic anisotropy of (Co50Pt50)1-y(SiNx)y (20 nm)/Ag (25 nm) granular films. SiNx would inhibit CoPt(001) preferred orientation. From the observation of TEM, when SiNx = 4.3 vol%, partial granular structure is observed, but the particle size and distribution are not uniform. When SiNx = 50 vol%, the uniformity of particle size and distribution is better, however, the magnetic easy axis is random and not perpendicular to the film plane.
Subjects
CoPt
(CoPt)1-y(SiNx)y
顆粒狀
granular
Type
thesis
File(s)
Loading...
Thumbnail Image
Name

ntu-96-R94527027-1.pdf

Size

23.53 KB

Format

Adobe PDF

Checksum

(MD5):d8fe5f6ec560399927f72f9cfff27b1a

臺大位居世界頂尖大學之列,為永久珍藏及向國際展現本校豐碩的研究成果及學術能量,圖書館整合機構典藏(NTUR)與學術庫(AH)不同功能平台,成為臺大學術典藏NTU scholars。期能整合研究能量、促進交流合作、保存學術產出、推廣研究成果。

To permanently archive and promote researcher profiles and scholarly works, Library integrates the services of “NTU Repository” with “Academic Hub” to form NTU Scholars.

總館學科館員 (Main Library)
醫學圖書館學科館員 (Medical Library)
社會科學院辜振甫紀念圖書館學科館員 (Social Sciences Library)

開放取用是從使用者角度提升資訊取用性的社會運動,應用在學術研究上是透過將研究著作公開供使用者自由取閱,以促進學術傳播及因應期刊訂購費用逐年攀升。同時可加速研究發展、提升研究影響力,NTU Scholars即為本校的開放取用典藏(OA Archive)平台。(點選深入了解OA)

  • 請確認所上傳的全文是原創的內容,若該文件包含部分內容的版權非匯入者所有,或由第三方贊助與合作完成,請確認該版權所有者及第三方同意提供此授權。
    Please represent that the submission is your original work, and that you have the right to grant the rights to upload.
  • 若欲上傳已出版的全文電子檔,可使用Open policy finder網站查詢,以確認出版單位之版權政策。
    Please use Open policy finder to find a summary of permissions that are normally given as part of each publisher's copyright transfer agreement.
  • 網站簡介 (Quickstart Guide)
  • 使用手冊 (Instruction Manual)
  • 線上預約服務 (Booking Service)
  • 方案一:臺灣大學計算機中心帳號登入
    (With C&INC Email Account)
  • 方案二:ORCID帳號登入 (With ORCID)
  • 方案一:定期更新ORCID者,以ID匯入 (Search for identifier (ORCID))
  • 方案二:自行建檔 (Default mode Submission)
  • 方案三:學科館員協助匯入 (Email worklist to subject librarians)

Built with DSpace-CRIS software - Extension maintained and optimized by 4Science