Synthesis, Fabrication, Characterization and Application of Novel Luminescent Electron Beam Resist and Magnetic Electron Beam Resist
Date Issued
2008
Date
2008
Author(s)
Wu, Ming-Chung
Abstract
We have successfully developed several novel luminescent electron beam resist systems and magnetic electron beam resist systems. The luminescent resists are made from CdSe/PMMA composite, MEHPPV/PMMA blend or P3HT/PMMA blend. The magnetic resist are made from sol-gel precursor of La0.7Sr0.3MnO3 or La0.6Ca0.4MnO3. Among the luminescent electron beam resist systems, P3HT/PMMA electron beam resist exhibits higher resolution than that of CdSe/PMMA composite resist does. The compatibility and stability of P3HT/PMMA is also better than that of CdSe/PMMA. For the magnetic electron beam resist systems, the same magnetizing field imposed on La0.6Ca0.4MnO3 causes larger magnetization than it on La0.7Sr0.3MnO3. Periodic arrays can be fabricated using these resists and further tailored by surface plasmons or photonic crystal to enhance and modulate their optical properties. For the photonic crystal applications, we have created unique periodical structures using water-developable La0.7Sr0.3MnO3 electron beam resist using an environmentally-friendly- one-step method. Both positive and negative patterns are readily fabricated by only varying the electron beam dosage. Different reflectance spectra of the patterned La0.7Sr0.3MnO3 in the visible light range (450 ~ 680 nm) can be obtained with a fix design pattern. When considering the surface plasmon applications, we can tune the surface plasmon resonance by adjusting the lattice constant and the column diameter of the patterned array to coincide with the excitation wavelength. Since there occurs an efficient energy transfer from the gold surface plasmon to the CdSe quantum dots, the composite film exhibits enhanced photoluminescence intensity up to 2.5 times at 570 nm. Therefore, our approach provides excellent opportunities for the CdSe quantum dots usage in high efficient optoelectronic devices. Our research also looks into the surface plasmon effect on Au coated periodic structured La0.7Sr0.3MnO3. From the extinction mapping measurement, we can easily distinguish the difference between the material with and without periodical structures. Also, by controlling the gold surface plasmon, we discover 20 times increases in photo counts of P3HT/PMMA.
Subjects
electron beam lithography
surface plasmon
photonic crystal
magnetic properties
photoluminescence
nanoparticle,electron beam resist
Type
thesis
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