https://scholars.lib.ntu.edu.tw/handle/123456789/75007
標題: | Optical Characterization of Two-dimensional Photonic Crystals Based on Spectroscopic Ellipsometry with Rigorous Coupled-Wave Analysis | 作者: | Lin, Chun-Hung Chen, Hsuen-Li Chao, Wen-Chi Hsieh, Chung-I Chang, Wen-Huei |
關鍵字: | Ellipsometry; Photonic crystal; Rigorous coupled-wave analysis | 公開日期: | 2006 | 期: | 83 | 起(迄)頁: | 1798-1804 | 來源出版物: | Microelectronic Engineering | 摘要: | A simple and non-destructive optical characterizing method for the 2D photonic crystal (PC) slab was carried out by using specular spectroscopic ellipsometry. The rigorous coupled-wave analysis (RCWA) was further applied to analyze the measured ellipsometric parameters and then to simulate the structure of the measured photonic crystal. A 2D square lattice of silicon rods fabricated by electron-beam lithography on the silicon substrate was used as a testing sample in this study. The reflectance spectrum of the characterized 2D PC was also simulated by RCWA to reflect its photonic bandgap behavior directly. © 2006 Elsevier B.V. All rights reserved. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/95618 https://www.scopus.com/inward/record.uri?eid=2-s2.0-33748261257&doi=10.1016%2fj.mee.2006.01.135&partnerID=40&md5=489c69a4daf516a121c7da37cf9faa9d |
ISSN: | 01679317 | SDG/關鍵字: | Crystal lattices; Crystal structure; Electron beam lithography; Ellipsometry; Energy gap; Reflectometers; Silicon; Spectroscopic analysis; Wave effects; Photonic bandgap; Photonic crystals; Rigorous coupled wave analysis; Spectroscopic ellipsometry; Crystals |
顯示於: | 材料科學與工程學系 |
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