https://scholars.lib.ntu.edu.tw/handle/123456789/77153
標題: | 半導體產業空氣污染控制技術研發-空氣離子化技術控制半導體產業揮發性有機化合物之研究 | 作者: | 李慧梅 | 關鍵字: | 空氣離子化;空氣負離子;生命週期;揮發性有機物;半導體產業;無塵室;air ionization;negative air ion (NAI);lifetime;volatile organic compounds (VOCs);semiconductor industry;cleanroom | 公開日期: | 31-七月-2003 | 出版社: | 臺北市:國立臺灣大學環境工程學研究所 | 摘要: | 本計畫發展空氣離子化控制技術,冀望以具有高反應性之離子化空氣直接去除揮 發性有機物,解決目前半導體產業廢氣與無塵室中氣相有機污染物面臨之問題。 本計畫通過第一年之部分,計畫內容為針對空氣離子化技術之各項影響因子進行 基礎研究,以瞭解空氣離子化之條件與各項操作因子。 This study investigated the generation of negative air ions (NAI) by negative electric discharge. The electric discharge was controlled at silent or dark discharge (not corona discharge). Therefore the by-products, ozone and NOx, can be controlled at non-detectable level. In experiments, six electrode types were conducted for threshold voltage testing of NAI generation. The concentrations of NAI were detected at different discharge voltages, humidities and space locations. The results show the stainless 0.2 mm electrode can operate at the lowest threshold voltage (2.6 kV) for NAI generation. When the operating voltage over the threshold voltage, the NAI can be generated hugely. In the retention time experiments, the half-life of NAI was approximately 25 sec and the maximum lifetime was about 80 sec. At 30 kV negative electric discharge, the average NAI concentration was 1.39´106 ion/cm3 at a 30 cm distance from discharge electrode. The experimental results show the well linear regression between NAI concentrations and distances from discharge electrode. The NAI concentrations displayed an exponential decay with distance in space. The relationship equation can be showed as Y= aÿ106 EXP(- bX), (NAI concentration,Y,ion/cm3; distance, X, cm). The b constant was between 0.01 and 0.04. The a and b constants were varied with humidity. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/22116 | 其他識別: | 912211E002053 | Rights: | 國立臺灣大學環境工程學研究所 |
顯示於: | 環境工程學研究所 |
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912211E002053.pdf | 275.61 kB | Adobe PDF | 檢視/開啟 |
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