Mechanical Modelling and Optimal Design of Micro-Cantilever Sensor
Date Issued
2004
Date
2004
Author(s)
Huang, Chun-Wei
DOI
zh-TW
Abstract
A simple mechanical model is set up to relate the intermolecular forces and the surface resultant forces and the tip deflection of the micro-cantilever beam. A computer simulation including a random docking process is performed to develop simulating the relationship between the tip deflection and docking time. Comparing with experimental data, the tendency is consistent. Besides, due to the convenience of the piezo-resistive cantilever sensors without resorting to laser detection, a finite element analysis is made for the better design of the piezo-resistive cantilever sensors with different shape of holes, which can heighten the sensitivity of detection.
Subjects
力學模型
有限元素法
壓阻材料
微懸臂梁感測器
micro-cantilever sensor
mechanical model
finite element method
piezo-resistive materials
Type
thesis
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