https://scholars.lib.ntu.edu.tw/handle/123456789/80465
標題: | 微機電磁浮式可定址控制靜電垂直致動之垂直鏡面
光通訊開關(II) A Novel Dual Tor sion Actuator for Large Displacement and Low Dr iving Voltage |
作者: | Wu,Wing Huang, Long-Sun Chen, Bin-Ru Chang, Peizen |
公開日期: | 31-七月-2001 | 出版社: | 臺北市:國立臺灣大學應用力學研究所 | 摘要: | An innovative, dual torsion actuator for large displacement and low driving voltage is presented. In the structural segment with a dual torsion design, the magnetically twisted micro actuator in the up position demonstrates a higher levitation compared to one torsion design. In addition, the actuator is electrostatically driven, clamping continuously down with a lower voltage. Fabrication and characterization of the micro actuator has been first demonstrated. The calculation of the twisted angle with respect to external magnetic fields is also conducted in a good agreement with the experiment. The present study of a large displacement of 570 mm and a low clamping voltage of 13 volt has been simultaneously achieved. |
URI: | http://ntur.lib.ntu.edu.tw//handle/246246/21617 | 其他識別: | 892218E002064 | Rights: | 國立臺灣大學應用力學研究所 |
顯示於: | 應用力學研究所 |
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892218E002064.pdf | 217.42 kB | Adobe PDF | 檢視/開啟 |
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