The Effect of Patterned Susceptor on the Thickness Uniformity of Rapid Thermal Oxides

Resource

IEEE Transactions on Semiconductor Manufacturing 12 (3): 340-344

Journal

IEEE Transactions on Semiconductor Manufacturing

Journal Volume

12

Journal Issue

3

Pages

340-344

Date Issued

1999-08

Date

1999-08

Author(s)

Lee, Kuo-Chung

Chang, Hong-Yuan

Chang, Hong

Wung, Tzong-Shyan

URI

File(s)

Name

02.pdf

Size

161.83 KB

Format

Adobe PDF

Checksum

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