表面聲波式多液珠溫控處理器之研製

Abstract

藉由表面聲波於液-固界面時，所轉換而成之滲漏表面波(Leaky Rayleigh Wave)與縱波，來造成聲射流的現象(acoustic streaming)。利用這種現象，將微液珠置於疏水之基材表面上，再配合斜交指叉電極(SFIT)所激發之表面波，當能量大於驅動液珠之臨界值時，便可讓液珠沿聲波傳遞方向移動。本文旨在利用兩對斜交指叉電極之驅動與偵測功能，整合自動控制系統及提升電極與疏水薄膜之效能，建立一完善之多通道微液珠控制器，再配合具有溫控功能之上蓋系統，研發出一具有溫度控制功能之多液珠處理器。論文以氧化鋅奈米柱與硬脂酸之使用，成功於液珠驅動平台之表面定義具有蓮花效應之疏水薄膜，並針對斜交指叉電極效能做有效之提升；同時利用比例-積分控制器，將微液珠準確控制於所指定之位置上；最後，結合具有加熱功能之上蓋系統，對液珠進行加熱，並且以溫度感測器對加熱器作溫度量測，達到溫控效果。利用此具有溫度控制功能之多液珠處理器，將可以發展生醫檢測等方面之實驗室單晶片

The surface acoustic wave excited by SFITs is used to drive the droplet on the hydrophobic surface. When SAW reaches the solid-liquid boundary, the acoustic streaming occurs in the liquid. If the acoustic streaming is large enough, the micro-droplet can be moved along the propagation direction of the surface acoustic wave. In the thesis, the temperature-controllable micro-droplets processor includes the following basic frameworks: the SAW device used to actuate and detect the droplet, the PI controller and the covered system with heaters and sensors. n this system, the ZnO nanorods and the stearic acid are used to define the hydrophobic film. The improvement of insertion loss and quality of hydrophobic film can be used to promote the repeatable usability of the SAW device. For accomplishing the accurate position performance of micro-droplet actuation, the PI controller system is necessary. In order to achieve the temperature-controllable scheme, the covered system with heaters and sensors can be used to control the temperature of the droplets.esults of this study show that the biological applications are proven feasible by using the temperature-controllable micro-droplets processor.